光谱型白光干涉在测距和光学薄膜相位测试中的应用研究-光学工程专业论文.docxVIP

浙江大学硕士论文 浙江大学硕士论文 浙江大学硕士论文 浙江大学硕士论文 11 11 III III Abstract In recent years ，with the development of ièmtosecond laser and high speed optic- fiber communicatio n， the study on thin film phωe properties has at仕acted rmre and more attentions and has become a hotspot in the 缸ea of optical thin film. So the characteration methods，usedωmeasure the phase properties of optical thin film，缸e also important in order ωtest if the specificatiom of the manufactured samples agree well w讪 the design The traditional methods fur measuring the optical or m n-optical properties ofthin film are unab 1e 旬Ireet the requ?reIrent fur the phase characteration In this theS5，a new techmlogy for the me出urement of thin film phase characteristic is proposed by using the spectral white-light interferometric. By this techmlogy，the absolute phase properties of thin film in a w诅e spec位al range could be retrieved in one t拉回. The main contesI茸s in this thesis 町e arranged as following: 1. The application of spec位al white-ligl亚 interièrometry system in the realm of optical e1eIrents dispersive measure Irents and absolute distance measurements. The key optical eleIrent in interferometer aoo certain optical sys能m， which called bea m-splitter is unab 1e 阳 solve the prob 1em of uneven thickness，which leads ωthe difference of optical path length(OPD). So this essay studied the dispersive ofthe bea m-splitter 曲目ly. The abso lute distance of two mirrors was achieved when Ire韶山ing the e能ctive thickness 0f the bea卧splitter. A∞ordingωtheme出ureIrent result on the spectral whit-light Michelson interferometer，the veracity and reliability of this Ireasureme皿Irethod w:出 proved by expenme皿 2. The application of spectral white-light inter丘。metric system in the Ireasureme 皿 ofthin filmpha民 characteristic. Firstly，we analyzed the phase characteristic of optical thin film theoretically. Secoooly，analysis ofthe feasibility ofthis measure Irent system was made， 缸瓦i a series of involved arithmetic was dermm位ated as w