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Abstract
Thermal distortion effects were one of the main impediments to be overcome in developing high power solid-state laser. With the increasing heat load induced by the high pump powers deposited into the gain medium, performance of laser was degraded due to thermally induced birefringence and lensing in the gain material. Some pieces of glass could be shaped to provide a phase shift that canceled out the distortions. But these pieces of glass only worked well for static distortion. Adaptive optics was an effective way to compensate the dynamic distortions. But adaptive optics had not found widespread acceptance due to the cost and complexity. It was not until recently that could the problem be readily solved with the development of micro-electromechanical systems (MEMS) based on silicon micromachining technology. In this paper, a micro deformable mirror based on MEMS technology was used in an intra-cavity adaptive optics system to compensate the thermal distortions of laser.
According to the resonator optics theory, the thermal lensing effects were discussed deeply. Several kinds of common measurement methods for the thermal lensing effects were introduced. And the different kinds of compensation methods were compared. For these methods an experimental project that the intra-cavity distortions of solid-state laser were measured with a referenced light and compensated by an adaptive optic system was studied.
Wavefront sensor and wavefront corrector were the main parts in the adaptive optic system. The characters of Hartmann wavefornt sensor were studied and the modal wavefront reconstruction algorithm based on Zernike polynomials were presented in detail. The control theory of the MEMS deformable mirror was studied. The main capability parameters were measured, and the influence function matrix was deduced, from which the relationship between voltages on poles and the shape of the MEMS deformable mirror could be told. On the closed-loop algorithm aspect, t
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