集成光波导的设计与分析-微电子学与固体电子学专业论文.docxVIP

Abstract Abstract Abstract Abstract Abstract Electrical interconnection has encountered the effect of parasitic parameters and Electro Magnetic Interference (EMI) because electron is the carrier of energy transmission in conventional electrical interconnection. It has already had a big effect on system performance such as the band width of system and bit error ratio (BER) with our increasing requirements of the application of super-high-speed circuits and large data transmission. As optical interconnection has the merits of super-high-speed and getting rid of EMI as a result of light becoming the carrier of energy transmission, it becomes a good choice in performing high efficiency transmission of information instead of electrical interconnection in the fields of high performance requirement. Optoelectronic integration, integrating the optical interconnection system and the electronic system, becomes an important direction in the development of information technology. On one hand, it makes the optical system reduce its volume, improve the stability and the efficiency and lower its power consumption; on the other hand, it increases the efficiency of interconnection in electronic system largely. Optical waveguide is used to realize optical interconnection in optoelectronic integration and optoelectronic integration requires considering the compatibility with microelectronic standard technology so as to use the developed microelectronic technology platform, so the key to realize optoelectronic integration is the performance of the Si-based optical waveguide and the way to use it. This paper analyzes the optical waveguide with the theory of guided wave optics and talks about the principle and method of making compute of it in using the numerical method of finite difference beam propagation method (FDBPM) as it is complicate to solve the wave equation strictly. Analyzes the common materials and structures of optical waveguides and makes comparison of them. Then makes res