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易文明硕士
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硕士论文
IV
IV
3. The thermopiezoelectric fields of PZT and BNT thin films induced by pulsed laser are obtained by MATLAB numerical calculation and finite element method simulation. The results of two methods are in good agreement. The temperature fields of PZT due to the pulsed laser irradiation are primarily controlled by the radial intensity distribution and temporal intensity distribution of the pulsed laser. The displacement along the radial direction is much larger than that along the vertical direction, and the radial electric displacement is much larger than vertical electric displacement. The normal and shear stresses in region irradiated by the laser beam are much larger than that outside the region, and all of the radial, circumferential and vertical stresses are compressive in the irradiated region. Furthermore, the values of radial and circumferential stresses are much larger than that of the vertical and shear stresses. Propagation of interfacial crack induced by delamination is possibly due to the compressive radial and circumferential stresses in laser beam the irradiated region. In the same condition, the thermopiezoelectric field distribution of BNT thin film is similar to that of PZT. The temperature of BNT thin film is lower than that in PZT thin film. The value of stress in BNT thin film is larger than that in PZT thin film. Comparing with the PZT thin film, there are larger displacement and smaller electric field in BNT thin film. These results provided a theoretical direction for the life prediction and failure mechanism of a piezoelectric thin film system subjected to dynamic thermal loading.
Key words: Thermopiezoelectric response; Pulsed laser; Piezoelectric potential function method(PPFM); Finite element method(FEM); PZT ferroelectric thin film; BNT ferroelectric thin film
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