射频集成电路电磁参数提取-电磁场与微波专业论文.docxVIP

浙江大学硕士学位论文Abstract 浙江大学硕士学位论文 Abstract In this paper,we show the importance and significance of RFICs electromagnetic parameter extraction．After that，some importance methods discussed here．In this paper,we use analysis method and numefical method to extract electromagnetic parameter of RFICs． For the analysis method，we apply model library approach which is fast and flexible to extract RFICs capacitance．In this paper,eight node capacitance models are presented to generate the Model Library．It is proved that these models can be used to extract the capacitances from almost all of the VLSI interconnect structures．We also give the formula for each model．The numerical results show that our method iS accurate．For the results are obtained by formulas，it is also very fast． For the numerical method,volume mesh and surface mesh method applied here． When use volume mesh method，we develop a fast integral equation method for extracting the inductances in RFICs，RFMEMs，IC packages，and deep submicron ICs etc．This method combines a recently developed Multilevel Green’S Function Interpolation Method(MLGFIM)with the volume integral equation discretized using Volume L00p basis functions．In it,in stead of using filaments model to simulate the currents flowing in the inductors，we use the conventional SWG basis functions for this kind of basis functions is flexible for problems with complex geometries．The shortest path finding algorithm is also used to fred the source loop basis functions． When use surface mesh method,we consider the resistances and inductances extraction from finite conducting metals．To remedy the weakness of volume integral equation,we extend the usage of a surface integral equation method from analyzing finite conducting rectangular wire strip to analyzing arbitrarily shaped geometry．The resistance and inductance extractions from the straight line，the spiral inductors，the bump，and the parallel buses in this paper demonstrate the validity and efficiency of Our method． Ke