类SCARA硅片传输机器人轨迹规划及控制器设计-机械工程专业论文.docxVIP

类 类 SCARA 硅片传输机器人轨迹规划及控制器设计 类 SCARA 硅片传输机器人轨迹规划及控制器设计 摘 要 随着现代工业的发展，集成电路（IC）产业己经成为当今世界的经济基础，IC 装备 产业则是 IC 产业的驱动力和必要支撑。作为 IC 装备产业的重要组成部分，硅片传输机器 人性能的优劣直接影响硅片的加工精度和生产效率。而硅片传输机器人性能又取决于两部 分，即机器人的结构性能和机器人的控制系统性能。本文主要工作就是对机器人进行轨迹 规划并设计合理有效的控制器，从而提高硅片传输机器人的控制性能。 首先，在充分分析国内外关于轨迹规划的发展及研究现状的基础上，针对所要研究的 类 SCARA 硅片传输机器人，本文采用一种基于迭代法的时间最优轨迹规划方案。在规划 过程中充分考虑了机器人系统的运动学、动力学约束，通过迭代法获得相邻插值点间的最 短时间间隔，采用五次多项式进行插值，最终得到了满足要求的平滑轨迹，并通过仿真验 证了这种规划方案是可行性。 其次，对类 SCARA 硅片传输机器人建立动力学模型，并对模型进一步分析得知该系 统是一耦合的非线性系统。基于国内外关于机器人控制器设计的发展和研究现状，综合考 虑各种控制手段的优缺点，结合本机构实际情况，确定采用滑模变结构控制方法对机器人 进行控制器设计。仿真结果表明，控制器能够准确的跟踪预期轨迹，当系统存在扰动的时 候具有很好的鲁棒性。 关键词：集成电路，机器人，控制系统，轨迹规划，控制器 i 河北工业大学硕士论文 河北工业大学硕士论文 THE TRAJECTORY PLANNING AND CONTROLLER DESIGN OF SIMILAR SCARA WAFER TRANSMISSION ROBOT ABSTRACT With the development of modern industry, the Integrated Circuit (IC) industry has already become the foundation of the world’s economy today, the IC equipment industries are driving force and necessary support of the IC industry. As an important part of the IC equipment industry, the merits of the performance of the wafer transmission robot influence the machining accuracy and efficiency of wafer directly. The performance depends on two parts, which are the structure performance and the control system performance of the robot. The main job of this paper is to complete the trajectory planning of the robot and design a reasonable and effective controller for the robot, so as to improve the controlling performance of the wafer transmission robot. Firstly, based on the analysis of the development of trajectory planning at home and abroad and the present situation of research, this paper presents a time-optimal trajectory planning scheme in connection with the similar SCARA wafer transmission robot. During the process of planning, the constraints of kinematics and dynamics were fully considered. Using the iterative method, we obtained the shortest time intervals between adjacent interpolation points. By using five times polynomial int