集成电路设计Ch4 Pattern transfer.pdf

Chapter 4 Pattern Transfer • Photolithography • Eching 1 4.1 Photolithography 2 photolithography 光刻 viscosity 粘质 intermediate 中间的 solvent 溶剂 pattern transfer 图形转换 likelihood 可能性 photoresist 光刻胶 resolution 分辨率 mask 掩膜版 proximity printing 接近式曝光 exposure 曝光 projecting printing 投影式曝光 softbake