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Plasma Technology and Applications
等离子体技术与应用
徐 军
Office: 三束实验室1号楼202房间
Office Time: 3:00 to 5:00 on Wednesday
Tel:8202, Mobile:
Email: xujun@dlut.edu.cn
Plasma Lectures 1
说明
学校教务处规定:选课人数少于15人的选修课停开;
但如果13级同学有人缺了这门选修课就不能毕业的
话,人数少于15人的选修课可以保留
Syllabus 教学大纲
• Course Objectives: 课程目的
-Plasma Technology: 等离子体技术
To understand The basic concept of low temperature plasma for
materials surface processing, to know what, how and why plasma
was employed in materials surface processing.
- Plasma Applications: 等离子体应用
Thin Films Deposition and Surface Modification, Plasma Applications
in Solar Cells fabrication, etc.
•上课时间:1-12周,周二7、8节,周五3、4节
•上课地点:西部校区综合教学2号楼A203
•答疑时间:每周三下午3点至5点
•答疑地点:三束实验室1号楼202房间
•期末考试时间:第12周,课程论文
Plasma Lectures 3
• Teaching Methods: 授课方式
- The Course Contents will be divided into three parts, each part
has several topics, see next slide. 授课内容分成三大专题,每
个专题包含几个话题,见后。
- I will give a brief introduction to each part, then ask you to
search,collect and read references based on your interesting
relevant to the topics, write course report (Homework) and
give a presentation for class discussion. 对每个专题,教师先讲
解;要求同学根据自己的兴趣进行资料收集及阅读,撰写报
告及课件(作业),进行课堂讨论。
• Grade: Class Performance课堂表现10%, Homework 作业20%,
Final Test 期末考试(课程论文): 70%
Plasma Lectures 4
• Course Topics Outline (Tentative):
-Topic 1: Course Introduction 课程概述
-Topic 2: Collisions in Plasma 等离子体中的碰撞
-Topic 3: Introduction to Plasma Chemistry 等离子体化学简介
-Topic 4: Overview of Plasma Generations and DC Discharge Plasma Sources等离子体产生概述
和直流放电等离子体源
-Topic 5: High Frequency Discharge Plasma 高频放电等离子体-1
-Topic 6: High Frequency Discharge Plasma 高频放电等离子体-2
-To
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