显微高光谱成像系统的设计.docVIP

第12卷　第4期 2004年8月　　　　　　　　　　　　光学精密工程 　Optics and Precision Engineering 　　　　　　　　Vol.12　No.4 　　Aug.2004 　　收稿日期:2004203220;修订日期:2004206215. 文章编号 (20040420367206 显微高光谱成像系统的设计 肖功海,舒　嵘,薛永祺 (中国科学院上海技术物理研究所,上海200083 摘要:设计出一种基于棱镜2光栅2棱镜组合分光方式的显微高光谱成像实验系统。系统根据推帚式成像光谱仪的原理进行设计,采用棱镜2光栅2棱镜组合元件在后光学系统进行光谱分光,利用高精度载物台自动装置驱动样品进行推扫成像,选用PCI 总线作为数据采集的微机接口。整个系统由显微镜、分光计、面阵CCD 相机、载物台自动装置以及数据采集与控制模块等几部分组成。系统的光谱范围从400nm 到800nm ,120个波段,光谱分辨率优于5nm ,空间分辨率大约1μm 。该系统具有直视性、光谱分辨率高、结构紧凑、成本低等优点;不仅能够提供微小物体在可见光范围的单波段显微图像,而且能够获得图像中任一像素的光谱曲线,实现了光谱技术和显微成像技术的结合,成功的将成像光谱技术应用到显微领域,可广泛应用于临床医学、生物学、材料学、微电子学等学科领域。关　键　词:显微成像光谱;高光谱成像;显微镜;光栅;CCD 相机;PCI 总线中图分类号:TH744.1　　文献标识码:A Design of microscopic hyperspectral im aging system XIAO G ong 2hai ,SHU Rong ,XU E Y ong 2qi (Shanghai Institute of T echnical Physics ,The Chinese Academy of Sciences ,Shanghai 200083,China Abstract :A novel microscopic hyperspectral imaging system was presented ,and its operating principle ,structure ,hardware and software design were discussed.The system was designed based on the principle of pushbroom hyperspectral imager ,direct vision dispersing prism 2grating 2prism component was used as spec 2trum 2dividing component ,and PCI bus was used as computer interface of high 2speed imaging spectral data acquiring subsystem.The whole system was composed of a microscope ,a spectrometer ,an area CCD camer 2a ,an automatic stage and data acquisition and control subsystem.Comparing to other spectrum 2dividing technologies ,the prism 2grating 2prism has advantages such as direct vision ,high spectral resolution ,compact structure and low cost.The system is capable of performing spectral imaging inplenty of spectral bands and micro 2spectroscopy in any image pixel ,in the spectral range 400through 800nm.The spectral resolution is less than 5nm ,and the spatial resolution is about one imicrometre.The system can be applied to a lot of fields ,such as clinic medicine ,biology ,material science ,microelectronics.The analysis results show that i