高阻抗pr-sa2测试报告.docxVIP

BOE 凯昉高阻抗TG?H708?SA2 BM评价报告 CF技术部 2015.10.22 SummaryBOE Summary BOE ?测试目的 凯昉高阻抗BM改善品(TG-H708-SA2)评价 ?测试结果 Lot/SlotGlassMask Lot/Slot Glass Mask OD值 BM CD(um) 3M Thick ( um ) AOI FC-0126M Coming 7.0 WVGA 1390 8.3 1.23 无 peeling FC-0126N 0.5T (6.5 um ) (4.55 ) 7.18 1.23 轻微膜损伤 SEM结果 BM线宽7.18 um以上无peeling发生，满足线宽要求 0D值较SA1有一定提高，1.2 um膜厚0D达4.55 SEM结果显示坡度角偏小(平均25 °),较SA1有改善，较8009有差异 附LBM工艺条件和结果 BQE ?测试结果 FC-0126 GLASS F70359E001Q~U Cut-filter Mask Coating speed ODThick Yes 7.0 WVGA 1650/1450 4.7/1.29 (6.5 um) 1590/1390 4.55/1.23 Corning 0.5T EXP 60Mj 40Mj 50Mj 60Mj 60Mj 60Mj 50Mj 60Mj HP DV AOI AOI Pic BMCD Macro 100°C 100°C 100°C 100°C 100°C 100°C 100°C 100°C 90s 90s 90s PR感光度强，极低曝光条件下，能满足线宽要求（7 um ） 水气Defect Oven后消失 无 peeling水与defect 膜损伤较重 局部轻微膜损伤 膜损伤较重 局部轻微膜损伤 8.22 6.49 7.33 8.27 局部轻微膜损伤 7.18 5.97 无 peeling 水 ^defect 无 peeling 水气defect 不良数目 300 6.42 end严重胶残留 end严重胶残留 排胶、end严重胶残留 suck back 160end无胶残留 无胶残留 无胶残留 EXP : 60mj/100um (Cut Filter use) DV Time : 80 S CD Result: 83 um (By TP/CD) CD Result: 8.28 um (By SEM ) Angle 20.83/22.05 2372/23.40 19.49/18.68 26.43/22.16 2345/24.57Points2 34 5ToCD8.487.838718.18 8.18 Angle 20.83/22.05 2372/23.40 19.49/18.68 26.43/22.16 2345/24.57 Points 2 3 4 5 To CD 8.48 7.83 871 8.18 8.18 EXP : 60mj/100um (Cut Filter use) DV Time : 90 S CD Result: 7.18 um (By TP/CD) CD Result: 736 um (By SEM ) 岫8009 SEMProfile1 2 3 4 5Points 岫 8009 SEM Profile 1 2 3 4 5 Angle 23.65/26.87 29.82/29.40 28.07/22.46 34.28/31.53 28.01/26.19 CD 7.68 7.17 7.17 7.60