粘接装夹条件下薄壁平面件应力变形预测.pdfVIP

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MECHANICALENGINEER

粘接装夹条件下薄壁平面件应力变形预测

孙辉，闫舒洋，齐书韬，孙玉文

（大连理工大学机械工程学院，辽宁大连116024）

摘要：应用于精密物理实验的薄壁平面构件具有径厚比大、刚性差等特点，加工过程中极易在应力的作用下产生较大的变

形。为提高薄壁平面件的制造精度，文中首先提出了一种基于局部粘接的低应力装夹策略，并给出了局部粘接装夹稳定性判定方

法，考虑材料非均匀去除过程，建立了薄壁平面件精密加工多次切削变形预测模型，最后通过实验验证了模型的准确性。

关键词：薄壁平面件；局部粘接装夹；精密加工；变形预测

中图分类号:TP391.7文献标志码:粤文章编号：员园园圆原圆猿猿猿（圆园22）01原园021原园5

PredictionofStressDeformationofThin-walledWaferPartsundertheBondingClampingCondition

SUNHui,YANShuyang,QIShutao,SUNYuwen

(SchoolofMechanicalEngineering,DalianUniversityofTechnology,Dalian116024,China)

Abstract:Withthecharacteristicsoflargediameter-to-thicknessratioandweakrigidity,thin-walledwaferpartsusedin

precisionphysicsexperimentsarepronetogeneratelargedeformationduringmachiningundertheeffectofthestress.In

ordertoimprovethemanufacturingaccuracyofthin-walledwaferparts,thispaperproposesalow-stressclampingstrategy

basedonlocalbondingandthemethodofdeterminingthestableclamping.Consideringthenon-uniformremovalprocess

ofmaterials,thepredictionmodelofmulti-cuttingdeformationinprecisionmachiningofthin-walledwaferpartsis

established.Finally,theaccuracyofthemodelisverifiedbyexperiments.

Keywords:thin-walledwaferparts;localbondingclamping;precisionmachining;deformation