半导体光电子材料与器件之Helios课件ch10 integration.pdfVIP

Lecture:Integrationofsilicon

photonicswithelectronics

PreparedbyJean-MarcFEDELI

CEA-LETI

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Context

Thegoalistogiveopticalfunctionalitiesto

electronicsintegratedcircuit(EIC)

Theobjectivesareeither:

Increasetheperformanceofphotonicswithembedded

electronic

Increasethedatatransmissionspeedbetweencores

withphotonics

SiliconPhotonics–PhDcoursepreparedwithinFP7-224312Heliosproject2

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Somegoals

MinimumimpactonEICdesignerlibrairies

DevelopmentofaspecificdesignerCMOSlibraries

requireahugeeffort(€€).Sointegrationofoptical

componentsrequiresminimumchangeofadesign

library

Wafertestabilitywithhighthroughput

OpticaldevicesonaEICchiphavetobetestedwith

thesameproceduresaselectronicdevices.Sofull

wafertestabilitywithoutanydicing,polishing,assembly

Lowestaddedprocesscomplexity

Thisisanissuerelatedtoyield,socost(€)

SiliconPhotonics–PhDcoursepreparedwithinFP7-224312Heliosproject3

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IntegrationofSiPhotonicsonEIC??

Pads

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BE:Backend