微电子技术论文s10854-016-5356-x.pdfVIP

JMaterSci:MaterElectron(2016)27:12074–12078

DOI10.1007/s10854-016-5356-x

MechanicalattritionassistedDCetchingaluminumfoils

withenhancedcapacitance

1211

ChaoleiBan•ShuqinZhu•XuquanTao•WangyangChen

Received:27April2016/Accepted:11July2016/Publishedonline:18July2016

SpringerScience+BusinessMediaNewYork2016

AbstractThealuminumfoilsforhighvoltagealuminumforincreasingthesurfaceareaoftheAlfoilelectrodeby

electrolyticcapacitorswereDCetchedinHCl–H2SO4formationofetchtunnels.Withtheincreasingdemandsfor

hybridacidsandtheeffectsofin-situmechanicalattritionthinnerandsmallerelectronicproducts,aluminumelec-

ontheetchingwerestudiedinthiswork.Comparedwithtrolyticcapacitorscallforhighercapacitanceandelectro-

theconventionaletching,thedistributionofetchtunnelschemicaletchingforhighsurfaceareaisavitalstageto

was,underin-situmechanicalattrition,moreuniformwithobtainhighcapacitance[1–3].

highdensityofetchpitsandlongtunnels,whichexpandsDCetchingprocessisverycomplicatedasitisaffected

thesurfaceareaofetchedAlelectrodeandgreatlybyacombinationoffactorssuchasgrainsize,cubictex-

increasesitscapacitance.Thiseffectisprobablyduetotheture,elementalimpuritiesofpurealuminumfoils,tem-

mechanicalattritioneffectswhicharebeneficialfortheperature,concentrationandcompositionofacidsolution,

breakdownoftheprotectivefilmandreducingconcentra-currentdensityandchargingelectricity,variouspretreat-

tionpolarizationinthe