超精表面三维形貌相移干涉检测实验研究.pdfVIP

第 23 卷 第 12 期 电子测量与仪器学报 Vol. 23 No. 12 2009 年 12 月 JOURNAL OF ELECTRONIC MEASUREMENT AND INSTRUMENT · 65 · 超精表面三维形貌相移干涉检测实验研究* 童晓蕾 李玉和 林浩山 祁 鑫 (清华大学精密仪器与机械学系精密测试技术及仪器国家重点实验室, 北京 100084) 摘 要: 超精表面检测技术已成为超精密测量技术重要组成部分。本文提出了一种超精表面三维形貌的相移干涉显微检测 方法。检测系统引入偏振分光棱镜, 建立相移检偏干涉与三维形貌重构模型, 采用四帧相移与轮廓中线法进行相位与粗糙度参 数计算。编制图像处理与系统测试软件, 并对标准样品进行实验, 结果表明: 样品粗糙度重复测量精度达 2.8 nm, 测试系统具有 抗干扰能力强、稳定性好等特点。 关键词: 相移干涉；粗糙度；三维形貌；超精表面 中图分类号: TH742.9 文献标识码: A 国家标准学科分类代码: 460.4030 Research on phase-shifting interferometry contrast three-dimensional topography of ultra precision surface Tong Xiaolei Li Yuhe Lin Haoshan Qi Xin (Department of Precision Instruments and Mechanology, Tsinghua University, State Key Laboratory of Precision Measurement Technology and Instruments, Beijing 100084, China) Abstract: The detection of ultra-precision surface has already been an important component of the ul- tra-precision measurement technique. In this paper, a phase-shifting interferometry method for three-dimensional (3D) topography of ultra-precision surface was proposed. The detection system in which polarization prism is in- troduced, builds a phase-shifting interference analyzer reconstruction and 3D morphology model, and uses the four phase-shift method and center line to calculate phase profile and roughness parameters. A image processing and system testing software was programmed. The experimental results of standard samples show that the repeat- ability of roughness is 2.8nm, the test system has a strong anti-interference ability, good stability, etc. Keywords: phase-shifting interferometry; roughness; three-dimensional topography; ultra