直流磁控溅射CrCr2O3金属陶瓷选择吸收薄膜的研究.pdfVIP

第 26 卷 　第 6 期 真 　空 　科 　学 　与 　技 　术 　学 　报 　　　　　　　 　　　　　　　　　　　 2006 年 11 、12 月 CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY 517 　 直流磁控溅射 Cr/ Cr O 金属陶瓷选择吸收薄膜的研究 2 3 潘永强 1 ,2 　Y. Yin2 ( 1 西安工业大学 光电工程学院 　西安 　710032 ; 2 澳大利亚悉尼大学物理系 　悉尼 　新南威尔士 　2006) Study on Selective Absorber Coatings of Cr/ Cr O Cermet Deposited 2 3 by DC Magnetron Sputtering Pan Yongqiang 1 ,2 ,Y. Yin2 ( 1School of Optoelectronic Engineering , Xi ’an Technological University , Xi ’an 710032 , China; 2School of Physics , The University of Sydney , NSW 2006 , Australia) 　　Abstract 　Solar selective absorber coatings of Cr/ Cr O cermet were deposited by DC reactive magnetron sputtering. Various growth fac 2 3 tors ,including oxygen flow rate ,sputtering current and target voltage ,were studied to optimize the quality of the coatings. And the optical con stants of Cr/ Cr O cermet ,grown under different conditions ,were characterized with ellipsometry. The absorptance and emittance of the opti 2 3 α ε mized coatings of Cr/ Cr O cermet at room temperature are ≥95 % and ≤5 % ,respectively. 2 3 　　Keywords 　DC magnetron sputtering ,Selective absorber ,Cermet ,Coatings 摘要 　光谱选择吸收薄膜的制备是太阳能集热器高效吸收太阳能的关键技术。本文首先研究了磁控溅射 Cr/ Cr O 金属