三维谐振触发测头的力学模型动态分析及实验.pdfVIP

中国科技论文在线 Dynamic analysis of mechanical model for three-dimensional resonant trigger probe and experiment# ** Yu Huijuan, Huang Qiangxian, Li Zhibo, Wang Maocui, Wei Jinpeng 5 (School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology, HeFei 230009) Abstract: A novel three-dimensional resonant trigger probe, which is fabricated with force sensitive components with good resonant characteristics and an integrated micro-stem and microsphere, is a new type of probe for micro/nano coordinating measuring machine (micro/nano CMM). In this paper, its 10 triggering mechanical models are proposed to simulate the nano interaction between sample surface and the microsphere tip of the probe. In the models, the interaction between the sample surface and microsphere tip in Z direction is presumed in tapping mode (TM) and the interactions in X and Y directions are presumed in friction mode (FM). Taking account of air damping, energy dissipation, restoring force of elastic deformation, nanoscale interface friction, interface adhesion and van der 15 Waals force, the models of the interactions between the microsphere tip and the sample surface in X(Y) direction and Z direction are deduced and constructed respectively. Based on the proposed mode