微纳米三坐标测量机驱动与控制系统的研究.pdfVIP

中国科技论文在线 Development of a Driving and Control System of Micro-nano CMM# * Huang Qiangxian, Gong Ermin, Han Bin, Zhang Weifu, Xu Congyu 5 (School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology, HeFei 230009) Abstract: In this paper, the construction of a driving System of Micro-nano CMM is described. Micro-nano CMM is a very complex measuring system, which contains complex mechanical structures, precise signal processing, probe system and driving system, and other subsystems and modules. A 10 novel probe, in this system, based on the principle of DVD pickup, is designed for three-dimensional measurement and positioning. Three piezoelectric linear motors are used as the actuators of the Micro-nano CMM. The mechanical structure of working stage here is made specially in order to aviod Abbe errors. Laser feedback interferometer, a new type of displacement sensor, based on the feedback effect is used as position measuring unit. A new driving and controlling strategy of Micro-nano CMM 15 is proposed, and can be used to achieve the fast and precise driving of large travel with nanometer resolution. The strokes of X, Y, Z are 50 mm × 50 mm × 50 mm. The driving system can