FeSiB薄膜的巨磁阻抗和应力阻抗效应研究.pdfVIP

第 22 卷 　第 6 期 真 　空 　科 　学 　与 　技 　术 　　　　　　　　　　 ( ) 　　　　　　　　　　　　　　 2002 年11月 VACUUM SCIENCE AND TECHNOLOGY CHINA 429 　 FeSiB 薄膜的巨磁阻抗和应力阻抗效应研究 茅昕辉 　禹金强 　周 　勇 　吴茂松 　蔡炳初 (上海交通大学微纳米科学技术研究院 ,薄膜与微细技术教育部重点实验室 　上海 　200030) Study of Giant Magnetoimpedance and Stressimpedance of FeSiB films Mao Xinhui ,Yu Jinqiang ,Zhou Yong ,Wu Maosong ,Cai Bingchu Key Laboratory for Thin Film and Microfabrication of Ministry of Education Research Institute of Micro/ Nanometer Science and Technology , Shanghai Jiao Tong University , Shanghai , 200030 , China 　　Abstract 　The soft magnetic FeSiB films with giant magnetoimpedance ( GMI) and stressimpedance ( SI) ,which can be used to fabricate highly sensitive microsensors of magnetic field and stress/ strain field ,were developed. Influence of frequency and annealing conditions on GMI and SI of the patterned FeSiB single layer and FeSiB/ Cu/ FeSiB multilayers were studied for the purpose of application exploration. The results show that strong GMI and SI effects can be observed at fairly low frequency for both the single layer and the multilayers after appropriate an nealing. We suggest that the multilayers with large SI effect can be a promising material to fabricate high sensitive stress/ train microsensors. 　　Keywords 　Giant magnetoimpedance ,Stressimpedance ,FeSiB films ,Multilayered films ( ) ( ) 　　摘要 　软磁材料中存在巨磁阻抗 giant magnetoimpedance ,GMI 效应以及与之相同来源的应力阻抗 stressimpedance ,SI 效 应 ,利用这两种效应可以制成具有高灵敏度的微型化的磁场和应力应变传感器。本文基于传感器的实际应用 ,对图形化的、 较大磁致伸缩的 FeSiB 单层和多层薄膜的巨磁阻抗和应力阻抗效应中频率和退火的影响进行了研究。