原创力文档Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique.pdfVIP
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Homogeneity analysis of sculptured thin films deposited in symmetric style through glancing angle deposition technique.pdf
Chin．Phys．B Vo1．23．No．11(2014)117801
Homogeneityanalysisofsculpturedthinfilmsdepositedinsymmetric
stylethroughglancingangledepositiontechnique木
)KeyLaboratoryofMaterialsforHighPowerLaserShanghaiInstituteofOpticsandFineMechanics
,
ChineseAcademyofSciences，Shanghai201800，China
b)universityofChineseAcademyofSciences
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