增强氮化硅涂层及其在晶体硅铸锭中应用.pdfVIP

第12 届中国光伏大会暨国际光伏展览会论文 增强氮化硅涂层及其在晶体硅铸锭中的应用 1 1 1，2 尹长浩 ，钟根香 ，黄新明 1. 东海晶澳太阳能科技有限公司；2. 南京工业大学材料科学与工程学院 摘要：本文采用改进溶胶凝胶法（sol-gel ）制备增强氮化硅涂层 （SG 涂层），并将其 应用于准单晶硅铸锭及普通多晶硅铸锭。实验结果显示：1）采用溶胶凝胶法制备的氮化硅 涂层，早期强度较常规喷涂法制备的涂层有显著的提高；2 ）氮化硅涂层中有机物的添加会 降低硅熔体与涂层间的非浸润性，涂层中有机物在加热过程中的碳化可能是其主要原因。铸 锭应用结果显示：完整的SG 工艺制备的氮化硅涂层可以满足准单晶硅铸锭脱模需要，同时， 免烧结SG 涂层可直接应用于普通多晶硅铸锭生产。 关键词: 氮化硅涂层；溶胶凝胶法； 准单晶硅；多晶硅 Reinforced Si N coatings and its application in silicon demoulding 3 4 1 1 1，2 Changhao Yin , Genxiang Zhong , Xinming Huang , 1) Donghai JA Solar Technology Co. Ltd. 2) College of Materials Sci. Engineering, Nanjing Univ. Tech. Abstract: In this paper, the silicon nitride coatings used in silicon casting were prepared by improved sol-gel method (SG), which had been used in quasi-mono crystalline silicon casting and multicrystalline silicon casting successfully. The experiments showed significant reinforcement in hardness of the coatings prepared by SG method compared with the coatings prepared by spraying-sintering method (SS). The remnants of the sol added in the coatings increased the wettability in the interface between silicon melt and coating, and carbonization of the organic contents in the coating during heating process was probably responsible for the result. The silicon casting applications showed that the coatings prepared by SG could be used in quasi-mono crystalline silicon casting, and the coatings prepared by SG without sintering could be used in multicrystalline silicon casting as well. Keywords ： silicon nitride coating, sol-gel, quasi-mono silicon, multi-crystalline silicon 1. 引言