ZnO外延薄膜的制备及孪晶的形成.pdfVIP

第 31 卷第 2 期 2009 年 3 月 Vol. 31 No. 2 Journal of Tangshan Teachers College Mar. 2009 物理学研究 ZnO 外延薄膜的制备及孪晶的形成 1 1 1 1 2 2 许贺菊 ，高永春 ，侯淑莲 ，张久云 ，张 丽 ，于 威 （1.华北煤炭医学院，河北 唐山 063000 ；2.河北大学 物理科学与技术学院，河北 保定 071002 ） 摘 要：采用螺旋波等离子体辅助溅射沉积法在衬底 Al2O3 的(0001 ）面上沉积ZnO 薄膜，所生长的薄膜在未 退火和退火时表现出不同的平面内取向。未退火时薄膜表现出较好的单筹异质外延生长，而退火后薄膜的Φ扫描 图像中出现了 12 个峰，这表明退火后薄膜出现反相筹，表现为孪晶生长。重点分析了退火对螺旋波等离子体辅助 溅射技术外延 ZnO 薄膜的结构及表面形貌的影响规律，为外延 ZnO 薄膜质量的提高及该技术应用的探索奠定基 础。 关键词：外延 ZnO 薄膜；退火；孪晶；等离子体 中图分类号：O484.1 文献标识码：A 文章编号：1009-9115(2009)02-0052-03 Epitaxial Growth of ZnO Films and the Form of the Twin Domains 1 1 1 1 2 2 XU He-ju , GAO Yong-chun , HOU Shu-lian , ZHANG Jiu-yun , ZHANG Li , YU Wei (1. North China Coal Medical University, Tangshan Hebei 063000, China; 2. College of physics science and technology, Hebei University, Baoding Hebei 071002, China) Abstract: Abstract: The epitaxial ZnO films are prepared on Al O substrates by using helicon wave plasma assisted sputtering 2 3 technique. The as-grown and annealed films showed different in-plane orientations. The as-grown showed the single domain heterogeneous epitaxial growth, but the Φ scan of the annealed showed 12 reflections, and orientation-domain boundaries appeared after annealing. The influence behavior of the structure and AFM images of the epitaxial ZnO films by annealing were analysised. It established the base for the improving of the quality of the epitaxial ZnO films and th