新型MEMS压阻高冲击加速度传感器技术地研究.pdf

新型MEMS压阻高冲击加速度传感器技术地研究.pdf

Abstract MEMS/MSTisanovel in technologydeveloped70s,last century;especially makea in90s.It’s fortheminiaturizationofthe greatstep obviouslyprofitable more fabricated system,with cheapebsubminiature,goodconsistencyparts by thesameastheIC novelaccelerometer MEMS,just fabricated chips.The by MEMSis usedinthe and widely arm,mobile,spaceflight aerocrafl,exploration anddisasterforecastAndMEMS accelerometeristhe high-shockpiezoresistive most branchof theMEMS the of important accelerometer,with advantagerapid and sensitivity,highmicrovolumes. response,high precision A structureofMEMS accelerometer eight-beam high-shockpiezoresistive was andachievedinthis whichisWLPandsensitiveinZ presented papeb chip axis, and awholemethodfrom toshock measurementIt the of has characteristic andlow highfrequency,widerange mainresearchissuesinthis is:thefirst cross-sensitivity.The paper ofMEMSis theresearch chapter--introduction,thedevelopment discussed,and ofthe second the

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