新型MEMS压阻高冲击加速度传感器技术地研究.pdf

Abstract MEMS／MSTisanovel in technologydeveloped70s，last century；especially makea in90s．It’s fortheminiaturizationofthe greatstep obviouslyprofitable more fabricated system，with cheapebsubminiature，goodconsistencyparts by thesameastheIC novelaccelerometer MEMS，just fabricated chips．The by MEMSis usedinthe and widely arm，mobile，spaceflight aerocrafl，exploration anddisasterforecastAndMEMS accelerometeristhe high-shockpiezoresistive most branchof theMEMS the of important accelerometer,with advantagerapid and sensitivity,highmicrovolumes． response，high precision A structureofMEMS accelerometer eight-beam high-shockpiezoresistive was andachievedinthis whichisWLPandsensitiveinZ presented papeb chip axis， and awholemethodfrom toshock measurementIt the of has characteristic andlow highfrequency,widerange mainresearchissuesinthis is：thefirst cross-sensitivity．The paper ofMEMSis theresearch chapter--introduction，thedevelopment discussed，and ofthe second the