薄膜制备技术化学气相沉积(CVD)解析.ppt

降低压强?减低粘滞系数?减小边界层厚度?LPCVD * * 近距沉积 In particular, the Peclet, Grashof/Rayleigh, Reynolds, Damkohler, and Knudsen numbers are important descriptors of CVD reactor processes. For example, when the Peclet number is large, species transfer is mainly due to convection, and downstream reaction products and impurities will not diffuse back to the reaction zone; for small Peclet numbers, transport due to diffusion dominates the flow. Large Grashof/Rayleigh numbers favor natural convection which tends to disturb the flow field. When the surface Damkohler number is large the film deposition process will