ppt课件-m e m s gyro- northwestern university（m e m s陀螺-西北大学）.pptVIP

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2017-01-25 发布于四川
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ppt课件-m e m s gyro- northwestern university（m e m s陀螺-西北大学）.ppt

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Disc Resonator Gyroscope(DRG) Jared Satrom Chris Fruth Goal of the Project To conduct research and analysis of a novel MEMS gyroscope design 1) Understand the motivation for the new patent from Boeing and Honeywell and others; why higher performance? 2) Identify new features in the novel design(s) and how higher performances are achieved 3) Compare to existing gyroscope designs 4) Analyze Q (quality) factor improvements Disc Resonating Gyro Basics Disc Resonating Gyro Basics Gyroscope is driven to resonate in-plane Electrodes sense deflection in outer ring sockets Electrodes actuate in inner ring sockets Circuits process the signal and feedback into the system Operation Principle of the DRG Coriolis Effect Coriolis acceleration (a) occurs if a resonating disc is pterturbed Depends on velocities on the disc ? higher frequencies allow Coriolis acceleration to dominate centrifugal acceleration Coriolis acceleration is what the electrodes sense through change in capacitance How Does the DRG Work? DC Source creates an electrostatic force that moves the disc Proper control of these electrodes can put the system into resonance Similarly, the sensing electrodes use gap changes to gauge system changes One Ring or Many? One major advantage of this system is its large area Compared to a single ring gyro, has much more control over actuation and sensing Single rings require flexible support beams as well Why Cut the Circles? Ideal Gyro High-Q Large S/N ratio Low-cost Small (1 cm3) Reliable Requiring low power Q-Factor Quality factor Q is the measure of energy dissipation Issue: Energy Dissipation Mechanisms Thermoelasticity: Mechanical energy is exchanged for thermal energy that is diffused Scattering Loss: “Elastic wave” of resonation is scattered due to material defects Anchor Loss: Elastic waves travel down the support column of the disc and dissipate Fluid Damping: Less significant, only a problem for low frequency applications Issue: Stiction and Electrode Damage