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Bragg Grating Optical Filters by UV Nanoimprinting英文文献资料.doc

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Bragg Grating Optical Filters by UV Nanoimprinting英文文献资料

HindawiPublishingCorporation JournalofNanomaterials Volume2012,ArticleID186429,5pages doi:10.1155/2012/186429 ResearchArticle BraggGratingOpticalFiltersbyUVNanoimprinting M.Casalboni, C.Palazzesi, 1 L.Dominici, 1 2 V.Foglietti, F.Michelotti, E.Orsini, 3 2 1 1 F.Stella, andP.Prosposito 1 1 DepartmentofPhysics,UniversityofRome—TorVergataandIstitutoNazionaleScienzeeTecnologiedeiMaterial(INSTM), ViadellaRicercaScienti?ca,1-00133Rome,Italy 2 3 DepartmentofEnergetics,UniversityofRome—laSapienza,andCNISM,ViaA.Scarpa16,00161Rome,Italy CNR-IFN,InstituteforPhotonicsandNanotechnologies,ViaCinetoRomano,00156Rome,Italy CorrespondenceshouldbeaddressedtoP.Prosposito,sposito@roma2.infn.it Received22November2011;Accepted28December2011 AcademicEditor:SevanP.Davtyan Copyright?2012M.Casalbonietal.ThisisanopenaccessarticledistributedundertheCreativeCommonsAttributionLicense, whichpermitsunrestricteduse,distribution,andreproductioninanymedium,providedtheoriginalworkisproperlycited. Resultsonanopticalwaveguide?lteroperatinginthenearIRregionarereported.Thedeviceconsistsofahybridsol-gel-based gratingloadedwaveguide,obtainedthroughthemergingofconventionalphotolithographyandUV-nanoimprinting.Starting fromsubmicrometricgratings,fabricatedbyelectronbeamlithography,asoftmouldhasbeenproducedandtheoriginalstructures werereplicatedontosol-gelphotosensitive?lms.A?nalphotolithographicstepallowedtheproductionofgrating-loadedchannel waveguides.Thedeviceswereopticallycharacterizedbytransmissionmeasurementsinthetelecomrange1450–1590nm.The?lter extinctionratiois?11dBandthebandwidthis1.7nm. 1.Introduction Inordertoovercomethislimit,unconventionalfabrica- tiontechniqueshavebeenveryrecentlyimplementedwith theaimofobtaininghigh-performanceandlow-costdevices [9]. In particular, nanoimprinting and soft lithography, whicharenonphotolithographicprocesses,basedonreplica molding for micro- and nanofabrication [9] emerged as a validandfast-processingalternativetotraditionalfabrication proces