Resonant Frequency Characteristics of a SAW Device Attached to Resonating Micropillars 英文参考文献.docVIP

Sensors 2012, 12, 3789-3797; doi:10.3390/s120403789 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Communication Resonant Frequency Characteristics of a SAW Device Attached to Resonating Micropillars N. Ramakrishnan 1,*, Harshal B. Nemade 2 and Roy Paily Palathinkal 3 1 School of Engineering, Monash University Sunway Campus, Jalan Lagoon Selatan, 46150 Bandar Sunway, Selangor Darul Ehsan, Malaysia 2 Electronics and Electrical Engineering and Centre for Nanotechnology, Indian Institute of Technology Guwahati, Guwahati 781039, India; E-Mail: harshal@iitg.ernet.in 3 Electronics and Electrical Engineering, Indian Institute of Technology Guwahati, Guwahati 781039, India; E-Mail: roypaily@iitg.ernet.in * Author to whom correspondence should be addressed; E-Mail: ramakrishnan@; Tel.: +603-5514-6256; Fax: +603-5515-6207. Received: 19 January 2012; in revised form: 29 February 2012 / Accepted: 1 March 2012 / Published: 23 March 2012 Abstract: Recently we reported experimental and simulation results on an increase in resonance frequency of a SAW resonator caused by mass loading of micropillars made of SU-8, attached normal to the surface of the resonator. We concluded that SAW resonator and the SU-8 micropillars in unison form a system of coupled resonators. We have now extended this work and performed a finite element method simulation to study the resonance frequency characteristics of the SAW-based coupled resonator. In this paper we report the effect of the resonance frequency of the micropillars on the resonance frequency of the system of coupled resonators, and observe the coupling of micropillar resonance and the propagating SAW as described in the well known Dybwad system of coupled resonators. Keywords: surface acoustic wave devices; resonance; microsensors 1. Introduction Surface acoustic wave (SAW) devices are widely used in sensor applications. The mass loading effect in SAW devices is o