Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes 英文参考文献.docVIP

Sensors 2010, 10, 3363-3372; doi:10.3390/s100403363 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes Chi-Yuan Lee *, Ay Su, Yin-Chieh Liu, Pin-Cheng Chan and Chia-Hung Lin Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan; E-Mails: meaysu@.tw (A.S.); M77YCLIU@.tw (Y.C.L.); s975132@.tw (P.C.C.); s975009@.tw (C.H.L.) * Author to whom correspondence should be addressed; E-Mail: cylee@.tw; Tel.: +886-3-4638800 ext. 2478; Fax: +886-3-4558013. Received: 8 February 2010; in revised form: 30 February 2010 / Accepted: 20 March 2010 / Published: 7 April 2010 Abstract: In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06 ± 0.005 (?/°C) and 0.033 pF/%RH, respectively. Keywords: LED; MEMS; flexible micro temperature; humidity sensors 1. Introduction Light emitting diodes (LED), which are environmentally friendly, consume little power and have a long lifetime, have caused a revolution in illuminatio