A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry.docVIP

Sensors 2009, 9, 2498-2510; doi:10.3390/OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry Shinn-Fwu Wang Department of Electronic Engineering, Ching Yun University, No.229, Chien-Hsin Rd., Jhongli City, Taoyuan, 320, Taiwan, ROC; E-Mail: sfwang@.tw; Tel.: +886-3-4581196, ext. 5113; Fax: +886-3-4588924 Received: 20 March 2009; in revised form: 9 April 2009 / Accepted: 10 April 2009 / Published: 14 April 2009 Abstract: A small-displacem