微-纳机构抗粘附研究进展.pdf

2010 29 12 (T ransducer andM icrosystem Technologies) 5 / 1 1 1, 2 1 1 岳陆游 , 何兴春, 丁建宁 , 杨继昌, 马皓晨 ( 1. , 212013; 2. , 213164) : /, , / / (MEMS/ EMS) /, , /, : /; ; ; : TH 112 : A : 1000 9787(2010) 12 0005 04 Development ofm icro/nanomachine antiadhesion study 1 1 1, 2 1 1 YUE Luyou, HE X ingchun , DI G Jianning , YA G Jichang, MA H aochen ( 1. School ofM echanica l En ineerin , Jian su University, Zhenjian 212013, China; 2. School ofM echanica l and New Ener y En ineerin , Chan zhou University, Chan zhou 213164, China) Abstract: Adhesion is a peculiar phenomenon ofm icro/nanomachine. W hen the strength of the component s materialmeets the demand, the adhesion and friction in the m icro/nanomachines are the main cause of their failure. To overcome or reduce adhesion has become the hotspot in the m icro/nanoelectromechanical systems (MEM S/ EM S) research field. The adhesion issue in them icro/nanomachines is introduced. Themechanisms of adhesion and various adhensivemodels used in adhesive contact are analyzed. Them icro/nanomachines design principle of antiadhesion using surface energy method and asperity integralmethod is illustrated. V arious anti adhesion methods such as release dry processes, real contact area reducing, and surface energy reducing, are presented. K ey words: MEM S/ EM S; adhesion; mode;l design 0 ,, [ 2] , 1970 ;, ,