多级罗茨干泵泵内传热与变形的计算和实验研究.pdfVIP

真空科学与技术学报 第 31 番第1 期 1 ∞ CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOωGY 2011 年1-2 月 多级罗茨干泵泵内传热与变形的计算和实验研究 刘 坤1 铸 巳德纯1 五光玉2 张振l导2 杨乃恒l (1.东北大学机械工程与自动化学院 tt阳 110819; 2. 中国科学院此阳科学仪器研制中心有限公司 忧阳 110168) Calculation and Measurement of Internal Heat Transfer and Deformation of Multi-Stage Roots Dry Vacuum Pump 1 1 2 2 Liu KWl , ßa DechWl , Wang G出哺u ，且叫矶时ou ， Yang N咖ni ( 1 .Northeas阳~ Uni仰咐， Shenyw啄 110819 ， CIUna; 2. SKY Technology Developmer甜 ojChù阳Academy 01 Scien棚，蜘叼ang 110168, China) Abs衍act 币le operation-pr叫uced intemal heat 恤nsfer and deformation of the multi-stage Roots 命y vacuum pump were modeled ,calculated and experimentally studied. Fírst ,the boWldary conditíons of 由e temperature distribution were obtaíned by samplí吨 the temperat旧e at key poínts in the roω，rs and on 出e pump walls in the ωntact and non-contact methods. N剧，the temperature field of the pump in 自teady operation w部 evaluated 明白 the ANSYS 50伽are 阳ckage. And finally ,the thermal deformation of 出e rotor 阻is and 由e pur叩 body was calculated; 也e deformation contours and curv四 were plotted ,resI附tívely. Pc酬íble applic现tíons of the ar叫ylícal and 叫J.erimental results in gearing clearance desi伊1 and leakage evaluation were al50 tentatívely disc山能d. Keywo时s Multistage Rωts 向 vacuum pump ,Thermal deformation ,Thel1Jl(护自tructure coupling analysis , Gearing clearan俑， Measure of multipoint temperature 摘要 间隙设计是多级罗茨千泵设计的3重要参数之一。在多级罗族干渠j运转时，间隙受