SIBONICA——采用新型高离化混合PVD工艺HI3技术生成的抗氧化性能最佳的新一代刀具涂层.pdfVIP

18 工具技术 SIBONICA-采用新型高离化混合 PVD 工艺 HI3 技术生成 的抗氧化性能最佳的新一代刀具涂层 smONICA , The next Generation of Highest Oxidation Resistant Tool Coatings Synthesised by Means of Novel High Ionization Hybrid PVD processing H I3 G. Erkens , J. Vetter , J. Müller , Th. Krienke Sulzer Metaplas GmbH 摘要:为满足现在及将来切削加工领域的各种挑战，技术和工艺专家们采用不同的沉积和表面处理技术，为切 削刀具提供独特和量身定制的涂层方案。棍合 PVD 工艺技术是一种为不同加工需求量身定制整体涂层解决方案 的创新方法。棍合工艺特指在同一台涂层装置中采用多种涂层工艺来生成层积颗粒。 HI3(三重高离化)t昆合技 术将 HIPAC( 高离化等离子体辅助涂层)技术与 APA -Arc( 先进等离子体辅助电弧)技术组合在一起。该技术将引 领当今及未来高性能精密刀具及零件涂层的发展。本文重点描述了该沉积技术以及采用该技术生成的新型微合金 混合涂层系列，如专利涂层 SIBON1CA ( ( AI ,Ti) N/SiBNC ( 0) )。为了展现该涂层在加工特殊材料时的卓越性能，在 高温条件下进行了抗氧化试验。切削加工特殊材料要求涂层刀具具有极高的热稳定性和抗氧化性，以及低的摩擦 力，因此，首次切削试验对上述性能进行了重点关注。 关键词:沉积;ti昆合工艺;涂层 中图分类号: TGl72 文献标志码:A Abstract; Technology and process experts provide unique and dedicated solutions for user? s current and future chal- lenges using various deposition and surface treatment technologies. One novel holistic approach to tailored solutions is the use of hybrid PVD process technology. The term hybrid processes applies when several processes for the generation of layer - forming particles 町e combined in a single coating system. HIPAC (Hi掉- Ionization Plasma Assisted Coating) sputtering technology , in combination with the APA - Arc technique (Advanced Plasma Assisted) represents the HI3 (High Ionization Triple) hybrid approach to coated high performance precision tools and components of today , tomorrow and the day after. ηle present work will highlight the deposition techniques to apply novel micro alloyed hybrid coatings such as patented S1- BONICA ( ( AI