silicon oxynitride optical waveguide ring resonator utilizing a two-mode interferometer structure氧氮化硅光波导环形谐振器利用双模干涉结构.pdfVIP

Hindawi Publishing Corporation International Journal of Photoenergy Volume 2012, Article ID 496267, 5 pages doi:10.1155/2012/496267 Research Article Silicon Oxynitride Optical Waveguide Ring Resonator Utilizing a Two-Mode Interferometer Structure Kaixin Chen1 and Hau Ping Chan2 1 School of Communication and Information Engineering, University of Electronics Science and Technology of China, Chengdu, Sichuan 610054, China 2 The Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong Correspondence should be addressed to Kaixin Chen, chenkxcn@ Received 26 May 2011; Revised 17 September 2011; Accepted 3 October 2011 Academic Editor: Leonid Khriachtchev Copyright © 2012 K. Chen and H. P. Chan. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. Silicon oxynitride (SiO N , SiON) optical waveguide ring resonator, in which a two-mode interferometer is used to replace the x y directional coupler in a conventional ring resonator, has been designed and fabricated. Preliminary results exhibit the same of free spectral range of 100 GHz but different quality factors of 3700 and 3900 at 1550 nm for transverse electric (TE) and transverse magnetic (TM) mode, respectively. The extinction ratio is more than 18 dB over the entire C-band, and the insertion loss is lower than 9.5 dB for TE and TM mode. 1. Introduction adaptive gain equalizer [16], and integrated spectrometers [17] have been reported. Optical waveguide ring res