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high sensitivity carbon nanotubes flow-rate sensors and their performance improvement by coating灵敏度高碳纳米管流量传感器及其性能改进的涂层.pdf

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high sensitivity carbon nanotubes flow-rate sensors and their performance improvement by coating灵敏度高碳纳米管流量传感器及其性能改进的涂层

Sensors 2010, 10, 4898-4906; doi:10.3390/s100504898 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Communication High Sensitivity Carbon Nanotubes Flow-Rate Sensors and Their Performance Improvement by Coating Xing Yang 1,2,*, Zhaoying Zhou 1,2, Dingqu Wang 1,2 and Xiaoli Liu 1,2 1 MEMS Lab, Department of Precision Instruments Mechanology, Tsinghua University, 100084, Beijing, China; E-Mails: zhouzy@ (Z.Z.); wangdq@ (D.W.); liuxiaoli09@163.com (X.L.) 2 State Key Lab of Precision Measurement Technology and Instrumentation, Tsinghua University, 100084, Beijing, China * Author to whom correspondence should be addressed; E-Mail: yangxing@; Tel.: +86-10-6277-9064; Fax: +86-10-10-6277-1478. Received: 26 March 2010; in revised form: 17 April 2010 / Accepted: 25 April 2010 / Published: 14 May 2010 Abstract: A new type of hot-wire flow-rate sensor (HWFS) with a sensing element made of a macro-sized carbon nanotube (CNT) strand is presented in this study. An effective way to improve repeatability of the CNT flow-rate sensor by coating a layer of Al O on 2 3 the CNT surface is proposed. Experimental results show that due to the large surface-to-volume ratio and thin coated Al O layer, the CNT flow-rate sensor has higher 2 3 sensitivity and faster response than a conventional platinum (Pt) HWFS. It is