原创力文档novel air flow meter for an automobile engine using a si sensor with porous si thermal isolation新颖空气流量计的汽车发动机使用si与多孔硅传感器热隔离.pdfVIP
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novel air flow meter for an automobile engine using a si sensor with porous si thermal isolation新颖空气流量计的汽车发动机使用si与多孔硅传感器热隔离
Sensors 2012, 12, 14838-14850; doi:10.3390/s121114838
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
Novel Air Flow Meter for an Automobile Engine Using a
Si Sensor with Porous Si Thermal Isolation
Emmanouel Hourdakis, Panagiotis Sarafis and Androula G. Nassiopoulou *
Institute of Microelectronics, NCSR Demokritos, Terma Patriarchou Grigoriou,
15310 Aghia Paraskevi, Greece; E-Mails: mhour@imel.demokritos.gr (E.H.);
pansarafis@imel.demokritos.gr (P.S.)
* Author to whom correspondence should be addressed;
E-Mail: A.Nassiopoulou@imel.demokritos.gr; Tel.: +30-210-650-3411; Fax: +30-210-651-1723.
Received: 4 September 2012; in revised form: 26 October 2012 / Accepted: 29 October 2012 /
Published: 2 November 2012
Abstract: An air flow meter for measuring the intake air of an automobile engine is
presented. It is based on a miniaturized silicon thermal mass flow sensor using a thick
porous Si (Po-Si) layer for local thermal isolation from the Si substrate, on which the
sensor active elements are integrated. The sensor is mounted on one side of a printed
circuit board (PCB), on the other side of which the readout and control electronics of the
meter are mounted. The PCB is fixed on a housing containing a semi-cylindrical flow tube,
in the middle of which the sensor is situated. An important advantage of the present air
flow meter is that it detects with equal sensitivity both
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