超短脉冲激光微焊接玻璃进展.PDFVIP

激光与光电子学进展 52, 080001(2015) Laser Optoelectronics Progress ©2015《中国激光》杂志社 超短脉冲激光微焊接玻璃进展 范文中 赵全忠 中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海201800 摘要 近年来，随着元器件不断小型化及人们对产品高密度、高可靠性要求的提高，有效的微连接已成为微加工的重 要环节之一。虽然目前已有多种方法可以实现同种材料或异种材料间的微连接，但对于玻璃等透明易碎材料，实现 有效的微连接一直是一个挑战。目前激光已被广泛应用于焊接各种材料，但普通长脉冲激光的能量不易被玻璃吸收 而且热膨胀易使玻璃碎裂，并不适合微焊接玻璃等透明材料。超短脉冲激光与透明材料相互作用具有热效应小及非 线性吸收的特点，非常适合透明材料的微焊接，目前已经成为微加工领域的研究热点。介绍了超短脉冲激光微焊接 玻璃的机理、存在的问题以及潜在应用，并对其未来发展进行了展望。 关键词 材料;超短脉冲激光;微连接;微焊接;玻璃;飞秒激光;皮秒激光 中图分类号 TN249 文献标识码 A doi: 10.3788/LOP52.080001 RecentProgressinUltrashortPulsedLasermicroweldingofGlasses FanWenzhong ZhaoQuanzhong StateKeyLaboratoryofHighFieldLaserPhysics,ShanghaiInstituteofOpticsandFineMechanics,Chinese AcademyofSciences,Shanghai 201800,China Abstract Inrecentyears,withthecontinuousminiaturizationofcomponentsandtherequirementsformore compact and highlyreliable products, effective microjoining has become one of the important parts of micromanufacturing.Severalmethodshavebeensuccessfullyusedtomicrojoinsimilarordissimilarmaterials. However,fortransparentandfragilematerials,suchasglasses,theeffectivemicrojoininghasbeenbeingachallenge. Nowadaysafewkindsoflasershavebeenwidelyusedforweldingmanymaterials,butforlaserswithlongpulsewidth, theenergycanhardlybeabsorbedandthethermalexpandingmaymaketheglassesbroken,whichisnotsuitable forglassesmicrojoining.Duetotheexcellentcharacteristicsoflittlethermaleffectofheatingmaterialsandnonlinear absorption,ultrashortpulsedlasersareverysuitableformicrojoiningglasses,whichhasbecomeahotresearchfield ofmicromanufacturing.Themechanismofultrashortpulsedlasermicroweldingofglasses,theexistingproblemsand thepotentialapplicationsareelaborated.Thefuturet