电容式超声传感器信号提取电路设计-微电子学与固体电子学专业论文.pdf.docxVIP

关键词：CMUT，微弱电容检测，线性调频，脉冲压缩Design of CUMT’s signal extracting circuit AbstractUltrasonic imaging technology has been played a huge role in medical diagnosis,non-destructive detection and seafloor topography detection,and ultrasonic sensors as the core component has also become a hot research topic. Capacitive ultrasonic transducer(CMUT) has emerged as the main research direction of the high-frequency ultrasonic sensor offering advantages such as without matching layer,wide bandwidth, easy to fabricate array, good stability.However, the capacitance of the sensors is so small, generally a magnitude of 0.1-1fF, the capacitance value change of the capacitor also in a magnitude of 0.1-1fF, or even smaller, while the operating frequency is relatively high. Therefore to design a circuit to detect the high-frequency weak dynamic value has become a urgent problem.To solve the above problem, we carried out the research. Firstly, systematic analysis of basic structure and working principles of capacitive ultrasonic sensor, capacitive ultrasonic sensor corresponding circuit model is created, and vibration membrane displacement formula is derived when sensor is under pressure, by the current formula of the sensor as well as film vibration velocity formula, and so on, then performance simulation analysis is done by using ANSYS finite element simulation software on the sensor that the parameters has been setted , displacement map and modal diagram is drawn, and resonant frequency and change value is also been determined, which provide the basis for the subsequent design of detection circuit. Then, two weak dynamic capacitance detection circuits of the capacitive ultrasonic sensor both applicable to our group are designed: One is based on the capacitance-voltage conversion principle of the capacitance detection circuit of the AC bridge, the other is based on the capacitor - current conversion principle of the transimpedance amplifier capacitance detection circuit, then sim