基于变迹加权设计的声表面波温度传感器的构建和分析-construction and analysis of surface acoustic wave temperature sensor based on apodization weighted design.docxVIP

优秀毕业论文 精品参考文献资料 Abstract Surface Acoustic Wave (SAW) sensor has many advantages such as small form factor and enhance sensitivity，above all，and it is easy to implement wireless and passive sensing. As a result, it can be widely applied in the sensing applications. The good frequency response characteristics make echo signal of SAW temperature sensor is easily detected. But the frequency response of existing SAW temperature sensors is generally poor. Therefore, the study of improving the SAW device frequency response characteristics has an increasingly important role. In this thesis, we focus on the work to strengthen the sensing performance of SAW temperature sensor by improving frequency response characteristics of device which include main lobe height and bandwidth. First of all, the piezoelectric crystal materials, prototype structures and reflecting grating structure are studied, respectively. Then the SAW velocities of different piezoelectric substrate materials are simulated by employing the theory of boundary condition determinant, electromechanical coupling coefficient(K2)、and temperature coefficient of frequency(TCF) are calculated using the simulation results. On that basis of the simulation and calculation, focusing on the actual needs of wireless and passive temperature sensing, 64° YX-cut lithium niobate and single-port resonator structure are selected as the designed SAW temperature sensor piezoelectric substrate material and device prototype structure, respectively. Secondly，the design method of apodization weighting is employed to improve the frequency response characteristics of SAW temperature sensor. Various SAW temperature sensors with different parameters or structures are designed. All of the designed devices are made by photolithography and lift-off process. The design method of apodization weighting brings troubles to fabrication of optical lithography mask, therefore, a novel mask design method based on MATLAB-cif-Ledit process is