拉曼力学实验中数据处理与压痕残余应力实验分析-data processing and indentation residual stress experimental analysis in raman mechanics experiments.docxVIP

aneffectivemethodinresidualstressexperimentalmeasurement.KeyWords：Micro-RamanSpectroscopy;NumericalSimulation;PeakFitting;MonocrystallineSilicon;ResidualStress摘要..............................................................................................................................IABSTRACT..................................................................................................................II目录...........................................................................................................................IV图清单...........................................................................................................................V表清单.......................................................................................................................VIII字母注释表.................................................................................................................IX第一章绪论..................................................................................................................11.1课题研究背景及意义.....................................................................................11.2拉曼光谱力学测量基本原理.........................................................................11.3拉曼谱线噪声处理及拉曼力学测量的应用.................................................51.4本文研究内容...............................................................................................13第二章拉曼光谱力学实验中的噪声分析................................................................142.1拉曼光谱噪声分析的数学工具...................................................................142.2拉曼光谱拟合函数的确定...........................................................................152.3三类典型噪声对峰位拟合结果的影响.......................................................202.4本章小结.......................................................................................................27第三章拉曼力学测量数据处理方法的研究............................................................283.1拉曼光谱中随机噪声处理方法的研究.......................................................283