高温压力传感器的特性测试技术分析-analysis of characteristic test technology of high temperature pressure sensor.docxVIP

The reseaarh of test technology about high temperature pressure sensors characteristicsAbstractThis paper is mainly to research a high temperature pressure sensor’s measuring and testing techniques. The core of the high pressure sensor sensitive components is a silicon piezoresistive pressure sensor, and the sensor with a special heat insulation, heat and the transmitting pressure’s structure. According to application in different environment and aims, the high temperature pressure sensor’s testing techniques and method is different also. In order to make the testing pressure is no distortion in the high temperature environment, we analysis the testing method from the sensor’s static and dynamic. And though testing and calibration, we obtain the sensor’s static model, dynamic model and the various performance parameters. In order to improve precision about the sensor’s test, I analysis the influence factor about the test accuracy. Through the combination of the temperature sensor and the single chip technology, I design the signal processing circuit, complete the temperature compensation about the pressure sensor and complete the sensor’s high temperature test. At last, I achieved the sensor’s signal which store and display.In the test about the high temperature pressure sensor’s dynamic characteristics, I mainly analysis the sensor’s test technology and the frequency characteristics. Using the right test method, I finished the high temperature pressure sensor’s dynamic characteristics test. The used method is the shock tube method. I analysis the high frequency pressure sensor’s dynamic with a shock tube method, According to test, I draw the sensor’s frequency response and technical index. I obtain the sensor’s frequency characteristics in FFT algorithm. And I make a conclusion about the different structure size of the pressure pipe’s influence to the high temperature pressure sensor.In the testing of high temperature pressure sensor’s static characteristics, Thoug