具有热净化功能集成探空仪湿度传感器分析-analysis of humidity sensor of integrated radiosonde with heat purification function.docxVIP

目录摘要...................................................................................................................IAbstract.................................................................................................................II第1章绪论.......................................................................................................11.1 概述............................................................................................................11.2目的意义.....................................................................................................31.3 国内外发展状况.........................................................................................41.4 本文主要研究内容.....................................................................................51.5 本文研究内容的组成.................................................................................6第2章湿度传感器原理及分类..........................................................................72.1湿度的定义.................................................................................................72.2 湿度传感器的分类.....................................................................................72.3 电容式湿度传感器工作原理.....................................................................92.4 本章小结....................................................................................................11第3章湿度传感器总体设计..............................................................................123.1 引言............................................................................................................123.2 湿度传感器总体设计.................................................................................123.2.1湿度传感器敏感芯片结构设计........................................................123.2.2MEMS微结构衬底设计143.2.3 加热器优化设计..............................................................................153.2.4 热力学仿真......................................................................................173.2.5 湿度传感器芯片版图设计...................................