半导体行业中物料自动控制的应用研究-软件工程专业论文.docxVIP

STOCKER 的接口设计，以及对数据库性能方面的考虑, 在这 些设计的基础上，同时由于前期的规划、需求分析比较到位， 使得这个系统基本涵盖了半导体搬运及加工流程的所有需求 3) 这个系统的设计完成，对于半导体行业中自动化物料搬运起 了决定性的作用，把以前需要依靠人为干预进行物料的自动 化搬运，变成了物料的自动化派工以及动态控制自动化搬运， 大大降低了生产成本以及人力资源。 关键词： 半导体行业， 物料控制，自动派工，芯片搬运，生产效率 Research on Automated Material Control System in Semiconductor Industry ABSTRACT The Chinese semi-conductor industry is currently at highly developing stage. In China, groups of highly structured and well-instituted semiconductor corporations have emerge into the scene. The manufacturing process of a semiconductor product is an extremely complicated process. To succeed in manufacturing an end product, it is necessary for the object to under go hundreds or even thousands of steps. The object is often dispatched into various locations in the FAB due to the needs of manufacturing processes, thus a well-defined mechanism becomes a necessity in promoting the throughput of the end products. Due to the enormous quantity of wafers that needs to be processed and the largely wide spread of the FAB area, the pinpointing of the needed wafer at its exactly location becomes a somewhat tedious task. It is almost impossible to automate the flowing process of the object and the automating of moving such object is also a serous obstacle. For the reasons above, the building of a well-defined and fully functional material automatic controlling system is extremely important. The focus of this paper is centered on the planning and designing of a material automatic controlling system rooted on behavior patterns of the semiconductor manufacturing process. This system should enclosed all the data necessary for dispatching the moving of the wafer, and the data should categorized and stored based on the physical locations of the equipments, thus it makes easy for the FAB operators to locate the actual position of needed wafer for wafer pre-dispatch and then automate the moving process. Also it should be able to dispatch water in bulk quantity if an actually need arises. With