超声辅助的飞秒激光微加工工艺研究-机械工程专业论文.docxVIP

武汉理工大学硕士学位论文 武汉理工大学硕士学位论文 万方数据 万方数据 Abstract Fiber-optic sensing technology shows priority over common measuring techniques and represents the developing tendency of new type sensor. Fabricating microstructure in the optical fiber to form new type fiber sensor is an efficient way. For its high peak power, small heat-affected zone, high precision processing. Femtosecond laser has been a very effective method for precision machining. This paper, focusing on the phenomena of residue accumulation and taper in the bottom, proposes femtosecond laser micromaching process with the assistance of ultrasonic wave, aiming at improving manufacture efficiency, manufacture quality and obtaining high-quality microstructure of optical fiber, in order to form new type optical fiber sensing probe. The main research content and achievements are as follows: In order to study the micromaching of femtosecond laser with assistance of ultrasonic wave, the ultrasonic vibration platform was set up. Choose sandwich type piezoelectric ceramic transducer structure which can obtain larger sight vibration with a small size of the ultrasonic vibration device. Through the establishment of theoretical model, analyze the performance of transducer when the nodal plane in different positions. According to the experimental requirements, the design should adopt the method of nodal plane in the center of transducer. A mathematical model of vibration wave equation of variable cross-section is established. Calculate the technical parameters of amplitude transformer in two structures, and choose the conical horn structure as our design through the comparative analysis. Finally, the resonant frequency of the ultrasonic vibration is 30 KHz, the output amplitude is 6 um, and the total length of ultrasonic transducer and amplitude transformer is 154.41 mm. In order to study the influence on femtosecond laser micromaching with ultrasonic wave, the depth and width are obtained by femtosecond laser with the assista