高介电性能纳米复合阳极氧化膜的研究-高分子化学与物理专业论文.docxVIP

南京理工大学硕士论文 南京理工大学硕士论文 高介电性能纳米复合阳极氧化膜的研究 捅要 本文首次采用电化学沉积方法，分别以多孔型氧化铝和壁垒型氧化铝基体作阴 极，钽片作阳极，在溴的丙酮溶液中采用直流电沉积方法，制备了高介电性能纳米复 合阳极氧化膜。 采用阳极氧化的电压一时间曲线、扫描电子显微镜、能量色散x射线谱、x射 线粉末衍射仪、LCR数字电桥等测试手段对多孔型氧化膜、壁垒型膜阳极氧化过程 以及直流电沉积制备复合氧化膜进行记录和表征。结果表明：在多孔型氧化铝的制各 过程中草酸电解液中聚合物的加入提高了多孔氧化膜的有序性，在以乙二醇为主的有 机溶液中一步法即可以制得高度有序多孔氧化膜。电性能研究表明多孔型氧化铝作基 体进行电沉积时，钽阳极溶解部分在多孔膜表面及多孔内部都有沉积，且以纳米尺寸 与多孔氧化膜复合。壁垒型氧化铝为基体电沉积制得的复合氧化膜的截面图分为三 层，分别为铝基体层，壁垒膜层，以及表面的沉积层。复合膜的电容量与未沉积之前 相比最高增加3倍。元素分析表明：壁垒膜做基体电沉积时表面钽的重量含量是多孔 膜做基体时的8．5倍。反应机理研究表明：溶液中溴离子是电沉积反应能够进行的重 要因素。 关键词：多孔型氧化铝壁垒型氧化铝复合氧化膜 电沉积介电性能 童室翌三查兰堡主堡苎 童室翌三查兰堡主堡苎 墨尘皇兰丝竺查墨盒里矍墨!兰璧堕堡垒 ABSTRACT The porous aluminum oxide and the barrier aluminum oxide as the cathode substrate respectively,the tantalum piece as the anode，used the direct current electrodoposifion method in the bromine acetone solution，has prepared the high dielectric properties nano-eomposite oxide film for the first time． ● The anodizing and electrodoposition process were characterized by means of Voltage-time CtllrveS，SEM，EDS，LCR digibridge．The results indicated that in the porous aluminum oxide preparation process the oxalic acid electrolyte with polymer enhanced the porous order degree，High—ordered porous alumina film was prepared by one step anodization in the organic solution．The dielectric performance indicated that the wntalum anode dissolves deposit in the porous surface and the porous internal，bonds with the porous oxide film by a nanometer size．When barrier aluminum oxide as the cathode subslxate for eleccrodeposition，the composite oxide film section was divide into three。 respectively be aluminum substrate layer。barrier oxide film layer。as well as surface deposit layer．The capacitance of composite oxide film was three times than ortginally oxide．EDS analysis indmated that the tamzdum weight content elec口rodeposit on the barrier aluminum oxide substrate was 8．Stimes more than electrodeposit on the porous alumin蛐oxide substxate．The reaction mechanism research indicated that the bromine ion in the solution