超声雾化热分解气相沉积法制备TiO2薄膜的气敏特性研究.PDF

30 4 2010 78 CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY 385 TiO 2 冯 庆* ( 400047) Oxygen Sensing Property of Noble Metal2Doped TiO Films 2 Deposited by Ultrasonic Spray Pyrolysis * Feng Qing ( College of P hysics, Key Lab . of Optics and Engineering , Chongqing N ormal University , Chongqing 400047, China Abstract The TiO films were deposited and doped with Ru,Rh and Ir impurities, respe tively, by ultrasoni spray 2 pyrolysis (USP) and ele tron beam evaporation.The impa ts of film growth onditions and doping on its quality were stud2 ied.The mi rostru tures and oxygen sensing property of the different TiO films were hara terizedwith transmission ele 2 2 tron mi ros opy and atomi for e mi ros opy. The results show that the doping ofRu, Rh and Ir signifi antly improves the oxygen sensing hara teristi s of the TiO films. For instan e, the TiO films grown and doped either with Ru, or Rh or Ir 2 2 atalysts by USP have mu h lower rea tion temperatures, higher sensitivities and faster response times than those of the un2doped TiO2 film, and the films grown by ele tron beam evaporation. Keywor ds Ultrasoni sp