电子散斑干涉测量技术在微结构测试中的应用研究测试计量技术及仪器专业论文.docxVIP

摘 摘 要 测试在研究和生产领域扮演着十分重要的角色。目前微结构的众多测 试方法大多针对光学平滑表面，这给微结构的科学研究和生产测试等应用 都带来了很大限制。 电子散斑干涉技术拥有光学测量技术的高精度、非接触、全场测量等 优点，又具有电子技术的高速度、自动化、操作简便等特长，还能对具有 散射表面的物体进行变形测量；因此近年来深受各国工程界和研究者的青 睐。目前，研究者们又不断努力将其应用于微观测试领域，以达到扩充微 观测试方法的目的。 本文在充分调研的基础上，设计并建立了结合相移技术的电子散斑干 涉显微测试系统，通过反射率较高表面的形貌测量对系统的性能进行验 证，并对散射表面的变形进行了初步的测试研究。本文的主要工作包括以 下几个方面： 1．对国内外微结构测试方法和散斑测试技术做出充分的调研，并分析 了电子散斑干涉技术在微结构几何量测量应用中的特点； 2．设计并组建了基于Linnik显微干涉结构的ESPI相移显微测试系 统； 3．将表面反射率较高的微结构作为测量对象，进行系统的调试和评价 实验，得到较好的表面形貌测量实验结果； 4．进行了散射表面离面变形的测试的初步实验研究，并对散斑干涉条 纹图像预处理方法作了有益的探讨。 关键词：微结构测试，离面位移，电子散斑干涉，Linnik ABSTRACTTest ABSTRACT Test is acting the extremely important role in the research and the production．Many testing methods of mierostructure aims at the optics even surface．This has all brought limit for the microstructure production test and the application domain． Electronic speckle pattern interferometry(ESPI)technology has optical measurement merits on high accuracy，non-contact，whole field measurement，it also has the electronic technology’S advantages such high velocity，the automation，the operation easily and SO on，and it can measure the distortion of optics scored surface，recent years，engineers and researchers from various countries are interested in this technology．At present，the researchers work hard to apply it in the microscopic test domain，for the expansion of microscopic test method． This article based on the full investigation and study foundation．It attempts a new microscopic structure characteristic test method，designed and established the electronic speckle interference micro test system with phase-shift technology．In this article measurement of optics even surface profile has been realized．This has confirmed the system performance．The speckle interference fringe patterns which stand for the out·of plane distortion of optics scored surface have been obtained by this system．This article’S prime task including following several aspects： 1．Made detailed investigation and study to the microstructure test methods and