zno紫外探测器的研究电子信息材料与元器件专业论文.docxVIP

A A B S T R A C T 嫩 也 in c re ase in AI e o n e e n tra tio n . T h e e le e tri e al P roP erti e s o f the A Z O thln filln s we re stud le d . A m iulm 切叮 resists叮c e o f the filln was o b tai n e d at a d o P ing e o nc e n 加币 o n o f sat% .T h e deteetor h as high resPons ivity aft er anne aled at 600 oC .T h e tim e resPO nse of the dete ctor h as bette r rePeatabllity. 形se tlm e of the dete cto r 15 fiister than fal ltiln e.A 3 X 3 aJ比ay d ete cto r h ed b e e n fab rie ate d . T h e te st resu lts ind ie ate d that the aJ比a y d ete cto r had high respo nse. K e州 。rd s: AZ O 面 n filin ，RF sP u tterin g ，U V d etee tor，respo ns ivi ty 111 目录 目录 目 录 第 一 章 绪 论 ...............................................................................................................……1 1.1 引言 ......................................................................................................................……1 1.2 Z n0 的 晶体 结构 ...................................................................................................……1 1.3 Z nO 的应 用 ...........................................................................................................……2 1.3.1 太 阳能 电池 ...................................................................................................……2 1.3 .2 光 电子器件 ...................................................................................................……3 1.3.3 声表面波器件 ...............................................................................................……3 1.4 Zn O 紫外探测器 的研 究概况 ...............................................................................……4 1.4 .1 光 电导紫外 探测器 .................................·..···················································……5 1.4 2 肖特 基紫 外探测 器 ..............................................·.·······································……6 1.4.3 PN 结型紫外探测器 .................................·····················································……6 1.4 .4 M gz