半导体制造过程中的重调度研究控制科学与工程控制理论与控制工程专业论文.docxVIP

AbstractABSTRACT Abstract ABSTRACT Semiconductor manufacturing is widely regarded one of the most complex manufacturing processes in the world．The particular complexity is characterized by reentrant，uncertainty,mixed processing，multi—product，etc—Rescheduling is thus becoming an indispensable capability for modern production management，where activeities of production schedule，before it is completed，must re—arranged due to customer needs of rapid changing nature． The research on rescheduling is reviewed in the paper．The conceptions about rescheduling is clearly defined and rescheduling framework for semiconductor manufacturing is presented．In the framework，rescheduling conisists of rescheduling strategy，rescheduling method and reseheduling perfomance evaluation． Hybrid rescheduling strategy based on fuzzy logic is proposed with Judge Controller and Choose Controller．A way to depart rescheduling genneration mcthod from model is proposed to make method choosing easily,and lot of rescheduling repair method for handing interuption events，including equipment breakdowns，rush orders，or order cancel and order priority increasement is pur forward．And then comprehensive perfomance evaluation system is百Ven and realized． Based on the framewirk，we realize rescheduling system on intel Minifab using SIMUL8 and雠．NET．The system is able to handle the scheduling interruption events efficiently．We conducted experiments in the model of minifab system，and compare the system the result． Key Words：Semiconductor manufacturing，Rescheduling，Rescheduling strategy, Rescheduling method，Performamce Evaluation． 学位论文版权使用授权书本人完全了解同济大学关于收集、保存、使用学位论文的规定， 学位论文版权使用授权书 本人完全了解同济大学关于收集、保存、使用学位论文的规定， 同意如下各项内容：按照学校要求提交学位论文的印刷本和电子版 本；学校有权保存学位论文的印刷本和电子版，并采用影印、缩印、 扫描、数字化或其它手段保存论文；学校有权提供目录检索以及提供 本学位论文全文或者部分的阅览服务；学校有权按有关规定向国家有 关部门或者机构送交论文的复印件和电子版；在不以赢利为目的的前 提下，学校可以适当复制论文的部分或全部内容用于学术活动。 学位论文作者签名：碎街；互 2仞‘年弓月f f日 经指导教师同意，本学位论文属于保密，在 年解密后适用 本授权书。 指导教师签名： 学位论文作者签名：译；笥亏2 年 月 日 加6年弓月／5／日 同济大学学位论文原创性声明本人郑重声明：所呈交的学位论文，是本人