基于光纤Fizeau干涉仪的振动传感器-光学工程专业论文.docxVIP

基于光纤 Fizeau 干涉仪的振动传感器 摘 要 随着航空、航天、桥梁、土木建筑等领域的发展，越来越多因力学振动诱发的问题 层出不穷，所以对这些领域安全检测传感器的测量精度、灵敏度及可靠性要求越来越高， 传统的振动传感器已经无法满足上述要求，所以研究和开发新型的高质量振动传感器迫 在眉睫。光纤振动传感器的问世引起了科研界的关注，因其传感灵敏度高、精度高、造 价低，更被广泛应用到实际。 本文围绕着基于光纤 Fizeau 干涉仪的振动传感器展开研究，首先对光纤振动传感器 的发展和背景做了详细介绍，对光纤 Fizeau 干涉仪的传感机理及结构进行了理论分析， 并对其谐振点做了判定，介绍了多种解调方法。 结合当今研究热点，设计了一种基于宽谱光源的 Fizeau 干涉式传感器，对其进行理 论分析，并利用其自身的传感特性同时进行了温度、曲率、应力或位移多参数测试。从 中发现该传感设计有着精确地测量系数，其优势在于利用宽谱光源输入系统，再通过对 输出光谱各部分变化或不变化准确的判断外界因素的改变量。 通过理论研究和测试，设计了基于光纤 Fizeau 干涉仪振动传感器的传感头，一种为 单腔式传感头，另一种为双腔式传感头，双腔式弥补了单腔式传感会造成信号衰减的缺 点，并对双腔式传感头进行了封装设计和制作。测试后，实际搭建了基于 Fizeau 干涉仪 的振动传感器系统，有效地实现了制作成本低，传感单元简化、使用寿命延长等，整个 系统由传感单元、光纤激光器、探测部分、信号采集和处理部分、实时显示部分组成。 分别测试了不同的振动信号，并通过强度信号解调的方法对信号进行了解调，实现了基 于 Fizeau 干涉仪的振动传感器系统。 关键词：光纤振动传感器；光纤 Fizeau 干涉式传感器；封装设计 哈尔滨工程大学硕士学位论文 ABSTRACT With the development of aviation, aerospace, bridges, civil construction and other areas, more and more questions caused by mechanical vibration come out. So it is higher for the require of the measurement precision, sensitivity and reliability in these areas safety detection sensor, but The traditional vibration sensor has been unable to meet these requirements, therefore, it is urgent to research the new high-quality vibration sensors. The emerge of the fiber vibration sensor caused the attention in the research community. Because of its high sensitivity, high accuracy, and low cost, it is more widely used. This paper focuses on fiber vibration sensor based on Fizeau interferometer. First, the development of fiber vibration sensor and background are induced in detail, and sensing mechanism and structure of Fiber interferometer are analyzed from the theory, and then the resonance working point be judged, last, A variety of demodulation methods are introduced. According to the research of the central issue, we design a kind of based on a wide spectrum of the light source Fiber interferometer sensors, and we analyze the theory. We use the sensing characteristics itself to measure the temperature, curvature, st