基于光度法及混合法的自动椭偏仪研究-光学专业论文.docxVIP

华南师范大学硕士学位论文 华南师范大学硕士学位论文 摘要 (8)为了缩短测量时间，优化了查表法和直接计算法程序。使得 光度法测量时间缩短为2～6秒。 (9)对样机进行了大量的试验测试，测试表明样机工作稳定可靠 精确度比HST—l型有所提高，适合于各种基底表面薄膜的测量。 关键词：椭偏测量法，光度法，混合法，步进电机，薄膜光学特性 —塑堕墨兰堡主兰壁望苎 —塑堕墨兰堡主兰壁望苎 垒!!!坠!! ABSTRACT E11ipsometry i s an optical technology with whi ch we are abl e to inspect optical properties and thickness of film．And i ts operatioB depends on the analysi s of the polarization altered before as well as after polari zed light reflecting upon the film． Owning to its brilliant preci sion， sensibility， non—destructiveness and HOD—perturbation，the ellipsometry i s widely applied into the fi elds such as the optical industry， electronic industry，metal industry，chemical industry as wall as physics，chemistry，biology and medieine ete． The Pro J ect con c e rni ng multiPl e di sciPli ne s of oPti c s，me ehani e s，el e ct roni c s and camputati on，mak e s a soun d i n vestigati on j nta th e sYst em of t be instru埘ent wit h the aim at sho rt comi ng s exi sti ng i n HST一1．The re search on performance of a11 parts withi o t he s Y st em enabl e s the re sear cher s to know how t o run it i n it s be st eonditi on．The Job done i n t hi s the si s i s as follow s： (1)A system of automated prototype ellipsometer i s constructed。wi th a research on eharacters of al l parts of the very system such as 1ight SOUrce，opti cal elements and paths as well as their influence upon the preci sion of measuring： (2)Aecording to the principle underlying the photometric method，thi s thesi s improves the data processing revi sion formula， which betters preci sion of the former method by eliminating noise of environmental 1ight，reducing random noi ses and modifying the data with extitiction ratios of DOlarizer and aDal yzer； 1 兰堕墅翌查兰堡±兰些堕苎 兰堕墅翌查兰堡±兰些堕苎 竺!!坠塑 (3)Theoretically as wel 1 as experimentally．the try to apply the photometri c method and the null method simultaneously i nto measuri Dg i S feasible， whi ch shortens time a