渐变折射率纳米多孔减反膜的仿真、制备和表征-物理电子学专业论文.docxVIP

暨南大学硕士学位论文 暨南大学硕士学位论文 II II Abstract In order to explore the broadband and omnidirectional antireflective performances optical simulations of pyramid model coatings had been accomplished by means of running programs and software under the guidance of theoretical analysis on gradient refractive index antireflective coatings. In the experiment borosilicate glass 3.3 (consists of wt. 81% SiO2, 13% B2O3, 4% Na2O, 2%Al2O3) that had been annealed 3 hours at the temperature of 550℃ were leached by HNO3 under different conditions of temperature and length of time for the sake of achieving graded-refractive-index porous nanostructured antireflective coatings. Field emission scanning electron microscopy （ SEM ） was used to observe the surface and cross-section morphologies of the coatings. Spectrophotometer was used to observe parallel and variable angle of incident light transmittances. The results show: Simulation results show that the reflectivity of graded-refractive-index pyramid model coatings will decrease as the thickness increases once the light is vertical incident. The reflectivity decreases to 0.0367-0.1458% when the thickness of coating increases to 1 μm. The coating owns perfect omnidirectional antireflective performance. Even when the Angle of incident light increases to 75°, the reflectivity still holds at the range of 13.1582-16.3702%. The surface of antireflective coating turns to be steady porous SiO2 nanostructure. The holes distribute evenly specifically the pore diameter of which is 20-40nm and the depth is 120-200nm. Once the length of leaching time of glass is too short the holes are sporadic and too long over-connected but the thickness of coating nearly has no change. The transmittance of antireflective glass which were leached 33 minutes by 0.2mol/L HNO3 at the temperature of 50℃ reaches to 98.5% which is 4%-7% higher than the common ones but 1% lower than the simulation one at some short wavelength. The coating achieved by expe